A deuterated Si(111) surface has been fabricated by wetting in deionized hot heavy water without oxidizing the surface. The surface had a single dominant absorption feature with a narrow width in the infrared spectrum. The surface was mainly composed of monodeuterides whose Si–D bonds are normal to the surface, and partially of other deuteride structures. The surface structure was quite similar to H/Si(111) formed in hot water. ©1995 American Institute of Physics.