Magnetron‐sputtered amorphous silicon
作者:
F. Demichelis,
A. Tagliaferro,
E. Tresso,
P. Rava,
期刊:
Journal of Applied Physics
(AIP Available online 1985)
卷期:
Volume 57,
issue 12
页码: 5424-5427
ISSN:0021-8979
年代: 1985
DOI:10.1063/1.334867
出版商: AIP
数据来源: AIP
摘要:
The optical properties of undoped &agr;‐Si:H films prepared using magnetron sputtering at different deposition conditions were studied by measuring their transmittance and reflectance between &lgr;=0.25 and &lgr;=1.5 &mgr;m and their thickness. The extracted optical constants are interpreted to give values of the band gap. Values of dark conductivity and activation energy are also obtained. The study has been extended to structures SnO2/&agr;‐Si:H/substrate. From measurements of transmittance and reflectance of the system optical constants of the components can be extracted.
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