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Magnetron‐sputtered amorphous silicon

 

作者: F. Demichelis,   A. Tagliaferro,   E. Tresso,   P. Rava,  

 

期刊: Journal of Applied Physics  (AIP Available online 1985)
卷期: Volume 57, issue 12  

页码: 5424-5427

 

ISSN:0021-8979

 

年代: 1985

 

DOI:10.1063/1.334867

 

出版商: AIP

 

数据来源: AIP

 

摘要:

The optical properties of undoped &agr;‐Si:H films prepared using magnetron sputtering at different deposition conditions were studied by measuring their transmittance and reflectance between &lgr;=0.25 and &lgr;=1.5 &mgr;m and their thickness. The extracted optical constants are interpreted to give values of the band gap. Values of dark conductivity and activation energy are also obtained. The study has been extended to structures SnO2/&agr;‐Si:H/substrate. From measurements of transmittance and reflectance of the system optical constants of the components can be extracted.

 

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