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Quantum well lasers with active region grown by laser‐assisted atomic layer epitaxy

 

作者: Q. Chen,   J. S. Osinski,   P. D. Dapkus,  

 

期刊: Applied Physics Letters  (AIP Available online 1990)
卷期: Volume 57, issue 14  

页码: 1437-1439

 

ISSN:0003-6951

 

年代: 1990

 

DOI:10.1063/1.103363

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Laser‐assisted atomic layer epitaxy (LALE) is used to locally deposit device‐quality material for the first time, as demonstrated by successfully fabricating broad‐area lasers with a GaAs quantum well grown in this way. By hybridizing LALE with conventional metalorganic chemical vapor deposition epitaxy, heterostructures are grown which allow characterization of material quality by photoluminescence and capacitance‐voltage measurements. In addition, graded‐index separate‐confinement heterostructure lasers with threshold current densities of 650 A/cm2for 580‐&mgr;m‐long devices were made using the LALE quantum well deposit, while devices made away from the deposit did not lase.

 

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