Erratum: Selective wet etching of lattice‐matched InGaAs/InAlAs on InP and metamorphic InGaAs/InAlAs on GaAs using succinic acid/hydrogen peroxide solution [J. Vac. Sci. Technol. B14, 3400 (1996)]

 

作者: Hervé Fourre,   Frédéric Diette,   Alain Cappy,  

 

期刊: Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena  （AIP Available online 1996）
卷期: Volume 14, issue 6  

页码: 3603-3603

 

ISSN:1071-1023

 

年代: 1996

 

DOI:10.1116/1.588734

 

出版商: American Vacuum Society

 

数据来源: AIP

 

 

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