The laser intensity modulation method (LIMM), developed by Lang in the early eighties, is a useful technique for determining the spatial polarization and/or space charge distributions in pyroelectric and/or piezoelectric materials, for instance in thin polymer electret films. The advantage of the LIMM is the high spatial resolution near the irradiated side. Therefore, we introduced the logarithmic spatial grid distribution into the deconvolution process. For the first time the self‐consistency method developed by Honerkamp and Weese is applied to the deconvolution program with respect to LIMM. Using multilayer systems with known spatial distributions our new equipment is tested with regard to providing reasonable results as well as the deconvolution program to represent the known spatial distributions.