The power‐conversion efficiency of SnO2/Si solar cells fabricated by electron‐beam evaporation of SnO2is strongly dependent on the angle of incidence of the SnO2vapor stream on silicon. The optimum angle of incidence is between 50° and 70°. Solar cells with power‐conversion efficiencies exceeding 10% have been reproducibly fabricated by depositing the SnO2at angles of incidence in this optimum range.