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Reference-Transfer Method of Vacuum-Gauge Calibration

 

作者: Charles F. Morrison,  

 

期刊: Journal of Vacuum Science and Technology  (AIP Available online 1967)
卷期: Volume 4, issue 5  

页码: 246-251

 

ISSN:0022-5355

 

年代: 1967

 

DOI:10.1116/1.1492552

 

出版商: American Vacuum Society

 

数据来源: AIP

 

摘要:

A new vacuum-gauge calibration method is described. Tile pressure ratio generated by the molecular flow of gas through two known, fixed, series conductances is applied repeatedly, serially in time, to establish a progression of increasing chamber pressures. A single pressure indication serves as the higher value in one ratio and the lower value in the succeeding ratio, thereby correlating the calibration pressures by a fixed known factor. Calibration pressures can be calculated after one of them is sufficiently high to be measured accurately by a reference system. In one modification, gauges are calibrated on a symmetrical, well-baffled chamber connected directly to the pump by a large conductance, thus significantly reducing the possible interaction between the establishment of new calibration pressures, and the pumping or outgassing of gauges being calibrated. A simple, single-pump apparatus suffices for calibrating from10−3Torr to within a decade of the system ultimate pressure. Re-producibility in the order of 2% is achieved in the10−9Torr decade.

 

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