Temperature dependence (77K‐room temperature) of evaporated germanium films and their annealed samples is investigated in the frequency range70×103∼ 60×106Hz. A transition from an &ohgr;sdependence to essentially dc behavior is observed, depending on temperature. Annealing at 250 °C decreases the conductivity and shifts the transition to a lower frequency. These behaviors are shown to be explained by the stochastic transport theory of impurity hopping conduction developed recently by Scher and Lax.