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Improved minority‐carrier lifetime in Si/SiGe heterojunction bipolar transistors grown by molecular beam epitaxy

 

作者: G. S. Higashi,   J. C. Bean,   C. Buescher,   R. Yadvish,   H. Temkin,  

 

期刊: Applied Physics Letters  (AIP Available online 1990)
卷期: Volume 56, issue 25  

页码: 2560-2562

 

ISSN:0003-6951

 

年代: 1990

 

DOI:10.1063/1.102886

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Noncontact‐probe photocarrier lifetime measurements have been used to give rapid feedback on minority‐carrier lifetimes of epitaxial Si/SiGe layers grown by molecular beam epitaxy (MBE). In this manner, problems with impurity incorporation during the crystal growth can be rapidly diagnosed in a device‐processing‐independent fashion. These improvements in minority‐carrier lifetime translate directly into high gains in the heterojunction bipolar transistors (HJBTs). HJBT test devices fabricated from the MBE‐grown Si/SiGe layers show current gains as high as 800. The homojunction gain of this device is estimated to be ∼6, making the heterojunction gain on the order of 130.

 

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