Low temperature metal-organic chemical vapor deposition of (Ba, Sr)TiO3thin films for capacitor applications
作者:
CheolSeong Hwang,
Jaehoo Park,
DooYoung Yang,
CheolHoon Yang,
DongHyun Kim,
YoungKi Han,
Kiyoung Oh,
ChulJu Hwang,
期刊:
Integrated Ferroelectrics
(Taylor Available online 2000)
卷期:
Volume 30,
issue 1-4
页码: 37-44
ISSN:1058-4587
年代: 2000
DOI:10.1080/10584580008222251
出版商: Taylor & Francis Group
关键词: Low temperature MOCVD;BST;dome type reactor;uniformity of composition and thickness
数据来源: Taylor
摘要:
Low temperature metal-organic chemical vapor deposition (MOCVD) processes for producing high dielectric (Ba, Sr)TiO3(BST) films studied using a noble dome type reactor, liquid delivery technique and new precursors. One of the problems associated with conventional MOCVD reactors having a shower head was substrate surface-dependent deposition of film composition as well as the thickness, which might result in pattern-dependent deposition of BST films. The new chamber used in this study was capable of controlling both the substrate heater and chamber wall temperatures which successfully eliminated such surface-dependent deposition property. The film composition and thickness were essentially the same on either Pt and SiO2surfaces when both the wall and heater temperatures were controlled. However, the film composition, thickness and uniformity were differed markedly on the Pt and SiO2surfaces when only the heater temperature was controlled. Excellent step coverage and smooth (haze-free) surface morpholgy of BST films were obtained from a deposition at 470°C.
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