Superconducting YBa2Cu3O7−xthin films were obtained under high vacuum (10−5Torr) on substrates of polycrystalline Al2O3sapphire, SrTiO3, and Si, having zero resistance at 81, 85, 87, and 79 K, respectively. A N2laser of 3.5 J cm−2energy density was used for the evaporation. The substrates were heated by a cw single‐mode CO2laser and the annealing was performed by the same laser in O2atmosphere. Local planar superconducting regions were obtained by focusing the radiation of the cw CO2laser upon the films. The films were investigated by scanning electron microscope, x‐ray microanalysis, and x‐ray diffraction.