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Preparation of Evaporated Silicon Films

 

作者: Ben F. Kilgore,   Richard W. Roberts,  

 

期刊: Review of Scientific Instruments  （AIP Available online 1963）
卷期: Volume 34, issue 1  

页码: 11-12

 

ISSN:0034-6748

 

年代: 1963

 

DOI:10.1063/1.1718107

 

出版商: AIP

 

数据来源: AIP

 

摘要:

A simple method for preparing evaporated thin films of silicon from an etched silicon filament is described. The method of mounting and processing the filament ensures low gas evolution during evaporation and makes possible the deposition of silicon films in a vacuum of ∼5×10−10Torr.

 

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