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Photoacoustic signal changes associated with variations in semiconductor crystallinity

 

作者: J. F. McClelland,   R. N. Kniseley,  

 

期刊: Applied Physics Letters  (AIP Available online 1979)
卷期: Volume 35, issue 8  

页码: 585-587

 

ISSN:0003-6951

 

年代: 1979

 

DOI:10.1063/1.91216

 

出版商: AIP

 

数据来源: AIP

 

摘要:

A photoacoustic (PA) signal dependence on Si crystal quality has been observed. The signal behavior has been investigated and on the basis of present evidence appears consistent, under conditions described in the letter, with PA theory as recently extended to include two‐layer systems. Results of this study have potential use in laser annealing applications because they may provide a means of rapidly evaluating the degree of recrystallization, using the annealing laser beam set at a lower power level for PA excitation.

 

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