A residual gas analyzer compatible with reactive and radioactive gases
作者:
J. von Seggern,
S. Berger,
M. Erdweg,
W. O. Hofer,
期刊:
Journal of Vacuum Science&Technology A: Vacuum, Surfaces, and Films
(AIP Available online 1984)
卷期:
Volume 2,
issue 4
页码: 1516-1520
ISSN:0734-2101
年代: 1984
DOI:10.1116/1.572464
出版商: American Vacuum Society
关键词: DESIGN;SENSITIVITY;VACUUM SYSTEMS;MASS SPECTROMETERS;GAS ANALYSIS;TRITIUM
数据来源: AIP
摘要:
A conventional residual gas analyzer was equipped with an ion‐electron converter as particle detector and tested in tritium‐containing environments. Substantial advantages can be asserted for this setup: high dynamic range, easy regenerability by baking without detrimental effects on the multiplier, insensitivity to exposure to reactive gases, and inexpensive replacement.
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