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A residual gas analyzer compatible with reactive and radioactive gases

 

作者: J. von Seggern,   S. Berger,   M. Erdweg,   W. O. Hofer,  

 

期刊: Journal of Vacuum Science&Technology A: Vacuum, Surfaces, and Films  (AIP Available online 1984)
卷期: Volume 2, issue 4  

页码: 1516-1520

 

ISSN:0734-2101

 

年代: 1984

 

DOI:10.1116/1.572464

 

出版商: American Vacuum Society

 

关键词: DESIGN;SENSITIVITY;VACUUM SYSTEMS;MASS SPECTROMETERS;GAS ANALYSIS;TRITIUM

 

数据来源: AIP

 

摘要:

A conventional residual gas analyzer was equipped with an ion‐electron converter as particle detector and tested in tritium‐containing environments. Substantial advantages can be asserted for this setup: high dynamic range, easy regenerability by baking without detrimental effects on the multiplier, insensitivity to exposure to reactive gases, and inexpensive replacement.

 

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