Ga0.47In0.53As/InP superlattice avalanche photodiode grown by metalorganic chemical vapor deposition
作者:
F. Beltram,
J. Allam,
F. Capasso,
U. Koren,
B. Miller,
期刊:
Applied Physics Letters
(AIP Available online 1987)
卷期:
Volume 50,
issue 17
页码: 1170-1172
ISSN:0003-6951
年代: 1987
DOI:10.1063/1.97952
出版商: AIP
数据来源: AIP
摘要:
We report the operation of the first Ga0.47In0.53As/InP superlattice avalanche photodiode grown by metalorganic chemical vapor deposition. The undoped region of thep‐i‐nstructure consists of 100 periods of alternating InP and Ga0.47In0.53As layers 100 A˚ thick with no intentional doping. dc multiplication higher than 20 and high‐speed response with full width at half‐maximum of 200 ps have been measured.
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