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Ga0.47In0.53As/InP superlattice avalanche photodiode grown by metalorganic chemical vapor deposition

 

作者: F. Beltram,   J. Allam,   F. Capasso,   U. Koren,   B. Miller,  

 

期刊: Applied Physics Letters  (AIP Available online 1987)
卷期: Volume 50, issue 17  

页码: 1170-1172

 

ISSN:0003-6951

 

年代: 1987

 

DOI:10.1063/1.97952

 

出版商: AIP

 

数据来源: AIP

 

摘要:

We report the operation of the first Ga0.47In0.53As/InP superlattice avalanche photodiode grown by metalorganic chemical vapor deposition. The undoped region of thep‐i‐nstructure consists of 100 periods of alternating InP and Ga0.47In0.53As layers 100 A˚ thick with no intentional doping. dc multiplication higher than 20 and high‐speed response with full width at half‐maximum of 200 ps have been measured.

 

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