Wet and dry etching characteristics of Al0.5In0.5P
作者:
J. R. Lothian,
J. M. Kuo,
W. S. Hobson,
E. Lane,
F. Ren,
S. J. Pearton,
期刊:
Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
(AIP Available online 1992)
卷期:
Volume 10,
issue 3
页码: 1061-1065
ISSN:1071-1023
年代: 1992
DOI:10.1116/1.586077
出版商: American Vacuum Society
关键词: ETCHING;ALUMINIUM PHOSPHIDES;INDIUM PHOSPHIDES;GALLIUM ARSENIDES;HYDROCHLORIC ACID;AQUEOUS SOLUTIONS;ELECTRON CYCLOTRON−RESONANCE;PLASMA;HETEROSTRUCTURES;AlInP
数据来源: AIP
摘要:
A selective wet chemical etching solution for removal of Al0.5In0.5P from GaAs based on HCl:H2O has been developed. Controllable etch rates from 600 Å min−1at 1HCl:30H2O to 6000 Å min−1at 1HCl:5H2O at 25 °C are obtained. The etch rate is thermally activated of the formR∝exp(−Ea/kT) whereEa=12.4 kCal mol−1, consistent with reaction‐limited etching. Dry etch rates of AlInP in PCl3/Ar, CCl2F2/Ar, or CH4/H2/Ar electron cyclotron resonance discharges are all<300 Å min−1for additional dc self‐biases of ≤250 V. Selectivities of ≳600:1 are obtained for etching GaAs over AlInP in CCl2F2/Ar discharges for dc biases ≤150 V. The etched surface morphologies are smooth, with small quantities of Cl‐containing residues remaining after PCl3/Ar exposure, and both Cl and F detectable after CCl2F2/Ar dry etching.
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