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Blister formation in alumina thin films bombarded with xenon ions

 

作者: L. Romana,   G. Fuchs,   G. Massouras,   P. Thevenard,  

 

期刊: Radiation Effects and Defects in Solids  (Taylor Available online 1990)
卷期: Volume 115, issue 1-3  

页码: 139-143

 

ISSN:1042-0150

 

年代: 1990

 

DOI:10.1080/10420159008220562

 

出版商: Taylor & Francis Group

 

关键词: Blister formation;alumina thin films;Xe irradiation;annealing

 

数据来源: Taylor

 

摘要:

Blisters have been observed in evaporated alumina thin films after xenon irradiation. The aim of this study is to further understand the mechanisms responsible of such process. Surface blistering dependence on thickness of the alumina films as well as irradiation fluence, temperature and post-irradiation thermal annealing have been investigated. From our experimental results, it has been proved that the substrate-alumina interface is not responsible for blistering. Also, according to the gas pressure model and the lateral compressive stress model the latter seems to be more adequate to explain blister formation.

 

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