Electron transport properties of double delta-doped GaAs structures grown by low-pressure metalorganic chemical vapor deposition
作者:
V. L. Gurtovoi,
V. V. Valyaev,
S. Yu. Shapoval,
A. N. Pustovit,
期刊:
Applied Physics Letters
(AIP Available online 1998)
卷期:
Volume 72,
issue 10
页码: 1202-1204
ISSN:0003-6951
年代: 1998
DOI:10.1063/1.121013
出版商: AIP
数据来源: AIP
摘要:
Electron transport properties of double delta-doped GaAs structures based on high electron mobility single delta-doped layers with a sheet concentration of3×1012 cm−2have been investigated for spacer thicknesses up to 1100 Å at 77 and 300 K. At an optimized spacer thickness of about 200 Å, a maximum in conductivity is observed, which exceeds the conductivity of a single delta-doped layer with the same total concentration by 30&percent; and 20&percent; at 300 and 77 K. The mobility and concentration as a function of spacer thickness are also presented and analyzed. ©1998 American Institute of Physics.
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