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Electron transport properties of double delta-doped GaAs structures grown by low-pressure metalorganic chemical vapor deposition

 

作者: V. L. Gurtovoi,   V. V. Valyaev,   S. Yu. Shapoval,   A. N. Pustovit,  

 

期刊: Applied Physics Letters  (AIP Available online 1998)
卷期: Volume 72, issue 10  

页码: 1202-1204

 

ISSN:0003-6951

 

年代: 1998

 

DOI:10.1063/1.121013

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Electron transport properties of double delta-doped GaAs structures based on high electron mobility single delta-doped layers with a sheet concentration of3×1012 cm−2have been investigated for spacer thicknesses up to 1100 Å at 77 and 300 K. At an optimized spacer thickness of about 200 Å, a maximum in conductivity is observed, which exceeds the conductivity of a single delta-doped layer with the same total concentration by 30&percent; and 20&percent; at 300 and 77 K. The mobility and concentration as a function of spacer thickness are also presented and analyzed. ©1998 American Institute of Physics.

 

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