The influence of channelling on the sputtering yield of polycrystalline copper
作者:
G.N. Van Wyk,
A.H. Lategan,
期刊:
Radiation Effects
(Taylor Available online 1981)
卷期:
Volume 58,
issue 5
页码: 139-144
ISSN:0033-7579
年代: 1981
DOI:10.1080/01422448108229077
出版商: Taylor & Francis Group
数据来源: Taylor
摘要:
Abstract A simple model is proposed to test the applicability of Sigmund's theory to polycrystalline copper targets. A fixed amount of fortuitous chan = nelling is allowed in the target and the sputtering coefficient is calculated by using a combination of single crystal sputtering theory and Sigmund's for= mula. The results indicate that the effect of channelling is to shift the sputtering maximum to higher energy values than predicted by the amorphous target theory. Furthermore, the form of the sputtering yield-energy curves deviate significantly from the Sigmund sputtering curve.
点击下载:
PDF (255KB)
返 回