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Low Cost Beam Current Integrator

 

作者: W. M. Carra,   J. E. Ehret,   J. M. Meese,  

 

期刊: Review of Scientific Instruments  (AIP Available online 1973)
卷期: Volume 44, issue 7  

页码: 835-836

 

ISSN:0034-6748

 

年代: 1973

 

DOI:10.1063/1.1686259

 

出版商: AIP

 

数据来源: AIP

 

摘要:

An inexpensive beam current integration system is described which measures the total integrated charge in a direct current accelerator beam during electron damage or ion implantation experiments over a wide range of positive or negative beam currents used in these experiments.

 

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