Propagation loss measurements in silicon‐on‐insulator optical waveguides formed by the bond‐and‐etchback process
作者:
A. F. Evans,
D. G. Hall,
W. P. Maszara,
期刊:
Applied Physics Letters
(AIP Available online 1991)
卷期:
Volume 59,
issue 14
页码: 1667-1669
ISSN:0003-6951
年代: 1991
DOI:10.1063/1.106262
出版商: AIP
数据来源: AIP
摘要:
We report the results of loss measurements for guided waves in silicon‐on‐insulator (SOI) optical waveguides formed by the bond‐and‐etchback process. Losses as low as 2.6 (2.0) dB/cm were found for the TE0(TM0) mode for wavelength &lgr;=1.319 &mgr;m. Grating coupling into these waveguides is demonstrated and discussed.
点击下载:
PDF
(350KB)
返 回