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Long‐wavelength (1.0–1.6 &mgr;m)In0.52Al0.48As/ In0.53(GaxAl1−x)0.47As/In0.53Ga0.47As metal‐semiconductor‐metal photodetector

 

作者: H. T. Griem,   S. Ray,   J. L. Freeman,   D. L. West,  

 

期刊: Applied Physics Letters  (AIP Available online 1990)
卷期: Volume 56, issue 11  

页码: 1067-1068

 

ISSN:0003-6951

 

年代: 1990

 

DOI:10.1063/1.102567

 

出版商: AIP

 

数据来源: AIP

 

摘要:

We have fabricated a metal‐semiconductor‐metal Schottky photodetector on a semi‐insulating InP substrate using a nominally lattice‐matched In0.52Al0.48As/In0.53(GaxAl1−x)0.47As (graded)/In0.53Ga0.47As structure grown by molecular beam epitaxy. On average the graded quaternary layer enhanced the responsivity by about 35% compared to an identical device without the graded region, reaching a maximum of 0.45 A/W at 10 V applied bias. The associated dark current was 95 nA; the dark capacitance was 90 fF. High‐speed measurements with a gain‐switched 1.3 &mgr;m laser diode demonstrated an instrumentation‐limited impulse response of 50 ps.

 

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