Long‐wavelength (1.0–1.6 &mgr;m)In0.52Al0.48As/ In0.53(GaxAl1−x)0.47As/In0.53Ga0.47As metal‐semiconductor‐metal photodetector
作者:
H. T. Griem,
S. Ray,
J. L. Freeman,
D. L. West,
期刊:
Applied Physics Letters
(AIP Available online 1990)
卷期:
Volume 56,
issue 11
页码: 1067-1068
ISSN:0003-6951
年代: 1990
DOI:10.1063/1.102567
出版商: AIP
数据来源: AIP
摘要:
We have fabricated a metal‐semiconductor‐metal Schottky photodetector on a semi‐insulating InP substrate using a nominally lattice‐matched In0.52Al0.48As/In0.53(GaxAl1−x)0.47As (graded)/In0.53Ga0.47As structure grown by molecular beam epitaxy. On average the graded quaternary layer enhanced the responsivity by about 35% compared to an identical device without the graded region, reaching a maximum of 0.45 A/W at 10 V applied bias. The associated dark current was 95 nA; the dark capacitance was 90 fF. High‐speed measurements with a gain‐switched 1.3 &mgr;m laser diode demonstrated an instrumentation‐limited impulse response of 50 ps.
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