Tunneling transducers: Quantum limited displacement monitors at the nanometer scale
作者:
Mark F. Bocko,
Kendall A. Stephenson,
期刊:
Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
(AIP Available online 1991)
卷期:
Volume 9,
issue 2
页码: 1363-1366
ISSN:1071-1023
年代: 1991
DOI:10.1116/1.585197
出版商: American Vacuum Society
关键词: DISPLACEMENTS;TRANSDUCERS;TUNNEL EFFECT;QUANTUM MECHANICS;MATHEMATICAL MODELS;EQUIVALENT CIRCUITS;NOISE;SENSORS
数据来源: AIP
摘要:
Displacement transducers based upon quantum mechanical tunneling of electrons can potentially achieve a sensitivity far superior to conventional transducers. The reason for this is that the dynamical influence of the tunneling transducer on a test mass is insignificant compared to that of traditional capacitive, inductive or piezoelectric transducers. Thus the fluctuating ‘‘back action’’ force from electrical noise in the tunneling transducer is nearly eliminated. The ‘‘back action’’ force becomes dominant as the test mass is miniaturized, thus the tunneling transducer may be especially useful in micro‐fabricated sensors. In this paper we present an equivalent circuit model for a tunneling transducer including noise and outline a method for calculating the minimum detectable signal in any given application. We also discuss some practical limits for tunneling‐based sensors.
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