Nanofabrication of a two‐dimensional array using laser‐focused atomic deposition
作者:
R. Gupta,
J. J. McClelland,
Z. J. Jabbour,
R. J. Celotta,
期刊:
Applied Physics Letters
(AIP Available online 1995)
卷期:
Volume 67,
issue 10
页码: 1378-1380
ISSN:0003-6951
年代: 1995
DOI:10.1063/1.115539
出版商: AIP
数据来源: AIP
摘要:
Fabrication of a two‐dimensional array of nanometer‐scale chromium features on a silicon substrate by laser‐focused atomic deposition is described. Features 13±1 nm high and having a full‐width at half maximum of 80±10 nm are fabricated in a square array with lattice constant 212.78 nm, determined by the laser wavelength. The array covers an area of approximately 100 &mgr;m×200 &mgr;m. Issues associated with laser‐focusing of atoms in a two‐dimensional standing wave are discussed, and potential applications and improvements of the process are mentioned.
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