Reactive ion etching of Ta–silicide/polysilicon double layers for the fabrication of integrated circuits
作者:
H. J. Mattausch,
B. Hasler,
W. Beinvogl,
期刊:
Journal of Vacuum Science&Technology B: Microelectronics Processing and Phenomena
(AIP Available online 1983)
卷期:
Volume 1,
issue 1
页码: 15-22
ISSN:0734-211X
年代: 1983
DOI:10.1116/1.582534
出版商: American Vacuum Society
关键词: etching;mos junctions;integrated circuits;fabrication;multilayers;tantalum silicides;silicon;integrated circuits;chlorine;gases;lithography;carbon tetrafluoride;sulfur fluorides;pressure dependence
数据来源: AIP
摘要:
Polysilicides currently find great interest as low resistivity gate and interconnect materials for integrated MOS circuits. We report on detailed investigations of the dry etching characteristics of Ta–silicide/n+‐poly‐Si double layers in fluorine and chlorine containing gases. A batch‐type parallel plate reactor operated in RIE mode is used. We find a sensitive dependence of the etching results on various process parameters, such as gas mixtures, pressure, and rf power. Possible mechanisms for these findings are discussed. Anisotropic etching of the double layer has been achieved using a two stage process. In addition, we analyze the influence of the layer preparation technique on etching profiles.
点击下载:
PDF
(602KB)
返 回