Epitaxial growth of zinc blende and wurtzitic gallium nitride thin films on (001) silicon
作者:
T. Lei,
M. Fanciulli,
R. J. Molnar,
T. D. Moustakas,
R. J. Graham,
J. Scanlon,
期刊:
Applied Physics Letters
(AIP Available online 1991)
卷期:
Volume 59,
issue 8
页码: 944-946
ISSN:0003-6951
年代: 1991
DOI:10.1063/1.106309
出版商: AIP
数据来源: AIP
摘要:
Zinc blende and wurtzitic GaN films have been epitaxially grown onto (001)Si by electron <m1;&1p>cyclotron resonance microwave plasma‐assisted molecular beam epitaxy, using a two‐step growth process. In this process a thin buffer layer is grown at relatively low temperatures followed by a higher temperature growth of the rest of the film. GaN films grown on a single crystalline GaN buffer have the zinc blende structure, while those grown on a polycrystalline or amorphous buffer have the wurtzitic structure.
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