Nonequilibrium solid solutions obtained by heavy ion implantation and laser annealing
作者:
N. Natsuaki,
M. Tamura,
T. Tokuyama,
期刊:
Journal of Applied Physics
(AIP Available online 1980)
卷期:
Volume 51,
issue 6
页码: 3373-3382
ISSN:0021-8979
年代: 1980
DOI:10.1063/1.328050
出版商: AIP
数据来源: AIP
摘要:
Nonequilibrium solid solubility of P, As, and B in single‐crystalline silicon annealed byQ‐switched ruby laser pulse irradiation was experimentally investigated for residual defects, lattice strain, and electrical activation of implanted impurities. The maximum solubility obtained without any macroscopically extended defect formation was 2–4 times higher than the thermal equilibrium solubility limit. Above this solubility, precipitates, dislocations, and surface cracks were observed. The highest full activation was realized by P implantation, with carrier concentration up to ∼5×1021/cm3showing no such defects. Formation mechanisms of the defects are discussed and shown to be attributable to the rapid solidification process of the heavily doped layer and to large impurity‐induced misfit stress comparable to the fracture stress.
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