Characterization and entrainment of subboundaries and defect trails in zone‐melting‐recrystallized Si films
作者:
M. W. Geis,
Henry I. Smith,
C. K. Chen,
期刊:
Journal of Applied Physics
(AIP Available online 1986)
卷期:
Volume 60,
issue 3
页码: 1152-1160
ISSN:0021-8979
年代: 1986
DOI:10.1063/1.337360
出版商: AIP
数据来源: AIP
摘要:
We have studied the morphology and crystallographic angular discontinuities of subboundaries and defect trails in zone‐melting‐recrystallized Si films. These subboundaries and defect trails, which originate at the interior corners of the faceted solidification front, are classified into seven types. Evidence is presented that in‐plane stress due to temperature gradients plays a major role in causing such defects. Various schemes for entraining subboundaries and defect trails are described.
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