Improved retarding field optics via image outside field
作者:
L. S. Hordon,
B. B. Boyer,
R. F. W. Pease,
期刊:
Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
(AIP Available online 1995)
卷期:
Volume 13,
issue 3
页码: 826-832
ISSN:1071-1023
年代: 1995
DOI:10.1116/1.588192
出版商: American Vacuum Society
关键词: ELECTRON BEAMS;ION BEAMS;BEAM OPTICS;FOCUSING;ELECTROSTATIC LENSES;CHROMATIC ABERRATIONS;ANALYTICAL SOLUTION;NUMERICAL SOLUTION;TRAJECTORIES
数据来源: AIP
摘要:
The advantages of a retarding field immersion lens for focusing low energy electrons and ions have been well chronicled. One recent development is a retarding field lens in which the sample is outside the retarding field (i.e., a nonimmersion lens). Thus, any sample roughness will not distort the focusing field. We describe here a simple model and analysis that indicates that the performance of such a lens can be almost as good as that of a retarding field immersion lens. For example, it should be possible to focus 1 keV electrons with an energy spread of 1 eV into a beam diameter of 4 nm using realistic values of maximum voltage and retarding field strength; the effective resolution under these conditions is estimated to be 1.4 nm.
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