首页   按字顺浏览 期刊浏览 卷期浏览 Improved retarding field optics via image outside field
Improved retarding field optics via image outside field

 

作者: L. S. Hordon,   B. B. Boyer,   R. F. W. Pease,  

 

期刊: Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena  (AIP Available online 1995)
卷期: Volume 13, issue 3  

页码: 826-832

 

ISSN:1071-1023

 

年代: 1995

 

DOI:10.1116/1.588192

 

出版商: American Vacuum Society

 

关键词: ELECTRON BEAMS;ION BEAMS;BEAM OPTICS;FOCUSING;ELECTROSTATIC LENSES;CHROMATIC ABERRATIONS;ANALYTICAL SOLUTION;NUMERICAL SOLUTION;TRAJECTORIES

 

数据来源: AIP

 

摘要:

The advantages of a retarding field immersion lens for focusing low energy electrons and ions have been well chronicled. One recent development is a retarding field lens in which the sample is outside the retarding field (i.e., a nonimmersion lens). Thus, any sample roughness will not distort the focusing field. We describe here a simple model and analysis that indicates that the performance of such a lens can be almost as good as that of a retarding field immersion lens. For example, it should be possible to focus 1 keV electrons with an energy spread of 1 eV into a beam diameter of 4 nm using realistic values of maximum voltage and retarding field strength; the effective resolution under these conditions is estimated to be 1.4 nm.

 

点击下载:  PDF (302KB)



返 回