Process control and pulsed laser deposition of materials
作者:
R. Diggers,
G. Kozlowski,
J. Jones,
D. Dempsey,
R. Kleismit,
I. Maartense,
J. Busbee,
T. Peterson,
R. Perrin,
期刊:
Integrated Ferroelectrics
(Taylor Available online 2000)
卷期:
Volume 28,
issue 1-4
页码: 201-211
ISSN:1058-4587
年代: 2000
DOI:10.1080/10584580008222232
出版商: Taylor & Francis Group
关键词: Process Control;Pulsed Laser Deposition;Emission Sensor;Superconductor;Ferroelectric
数据来源: Taylor
摘要:
Pulsed-laser deposition (PLD) is a very powerful and rapid deposition technique, which can produce exceptional-quality thin films. Although PLD has tremendous versatility and potential, PLD capabilities are still constrained by a lack of process control. At the Air Force Research Laboratory on-site at Wright-Patterson AFB, we are developing in-situ/real-time control methodologies for PLD and other thin-film deposition processes. We have identified appropriate sensors for closed-loop feedback control and utilized them with YBa2Cu3O7-x(YBCO) to identify critical process control parameters. Control instrumentation has recently been improved by the addition of moveable fixed-position plume-emission sensors. The reproducibility of YBCO film quality increased significantly when process control was applied to PLD processing.
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