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Process control and pulsed laser deposition of materials

 

作者: R. Diggers,   G. Kozlowski,   J. Jones,   D. Dempsey,   R. Kleismit,   I. Maartense,   J. Busbee,   T. Peterson,   R. Perrin,  

 

期刊: Integrated Ferroelectrics  (Taylor Available online 2000)
卷期: Volume 28, issue 1-4  

页码: 201-211

 

ISSN:1058-4587

 

年代: 2000

 

DOI:10.1080/10584580008222232

 

出版商: Taylor & Francis Group

 

关键词: Process Control;Pulsed Laser Deposition;Emission Sensor;Superconductor;Ferroelectric

 

数据来源: Taylor

 

摘要:

Pulsed-laser deposition (PLD) is a very powerful and rapid deposition technique, which can produce exceptional-quality thin films. Although PLD has tremendous versatility and potential, PLD capabilities are still constrained by a lack of process control. At the Air Force Research Laboratory on-site at Wright-Patterson AFB, we are developing in-situ/real-time control methodologies for PLD and other thin-film deposition processes. We have identified appropriate sensors for closed-loop feedback control and utilized them with YBa2Cu3O7-x(YBCO) to identify critical process control parameters. Control instrumentation has recently been improved by the addition of moveable fixed-position plume-emission sensors. The reproducibility of YBCO film quality increased significantly when process control was applied to PLD processing.

 

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