AbstractComplex metal oxides, including ferroelectric, ferrimagnetic and superconducting ceramics, have a variety of technologically useful properties that can be exploited for a number of applications. Fabrication of complex metal oxide ceramics with specific properties requires high‐purity powders with controlled chemical compositions, size distributions, and morphologies. Powders with these characteristics can be produced by aerosol processes in which fine particles are generated in gaseous flow systems. The particles can also be deposited from the gas phase onto surfaces to form films. This paper will discuss the use of aerosol processes for the generation of complex metal oxide powders. A review of aerosol processes will be presented first, followed by a discussion of the methods used for the generation of superconducting ceramic powders. Examples include the production of YBa2Cu3O7, La1.85Sr0.15CuO4, and Tl‐Ca‐Ba‐Cu‐O powders and films. Emphasis will be placed on defining the conditions required for the generation of chemically homogeneous particles with controlled mor