Method for Controlled Multicomponent Sputtering
作者:
W. Robert Sinclair,
F. G. Peters,
期刊:
Review of Scientific Instruments
(AIP Available online 1962)
卷期:
Volume 33,
issue 7
页码: 744-746
ISSN:0034-6748
年代: 1962
DOI:10.1063/1.1717949
出版商: AIP
数据来源: AIP
摘要:
A method for sputtering simultaneously from electrically independent electrodes is described. The important design consideration is that the electrodes (cathodes) are enveloped by a single Crooke's dark space. Using this technique, alloy films (or in the case of reactive sputtering, mixed compound films) can be obtained. Since the electrodes are independent, the composition gradient (in depth) of the film can be varied at will by proper variation of applied voltages.
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