Atomic force microscopy study of electron beam written contamination structures
作者:
M. Amman,
J. W. Sleight,
D. R. Lombardi,
R. E. Welser,
M. R. Deshpande,
M. A. Reed,
L. J. Guido,
期刊:
Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
(AIP Available online 1996)
卷期:
Volume 14,
issue 1
页码: 54-62
ISSN:1071-1023
年代: 1996
DOI:10.1116/1.588429
出版商: American Vacuum Society
关键词: HYDROCARBONS;SURFACE CONTAMINATION;RADIATION EFFECTS;ELECTRON BEAMS;ELECTRON COLLISIONS;DIFFUSION;SCATTERING THEORY;ATOMIC FORCE MICROSCOPY
数据来源: AIP
摘要:
Electron radiation induced hydrocarbon contamination can be either a problem or a useful tool in electron beam analyses and lithographies. We have used atomic force microscopy to study electron beam written contamination structures. Contamination is shown not only to arise from the primary electron beam but also from the energy scattered outside of the direct impingement area. The size of the contamination structures correlates well with that expected from electron scattering theory. By varying the geometry of the written structures, the rate at which the electron dose is deposited, and the nearby hydrocarbon surface density, we show that surface diffusion of hydrocarbon molecules plays a primary role in the formation of the contamination structures.
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