Growth of uniform HgCdTe by metalorganic chemical vapor deposition system
作者:
S. Murakami,
Y. Sakachi,
H. Nishino,
T. Saito,
K. Shinohara,
H. Takigawa,
期刊:
Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
(AIP Available online 1992)
卷期:
Volume 10,
issue 4
页码: 1380-1383
ISSN:1071-1023
年代: 1992
DOI:10.1116/1.585872
出版商: American Vacuum Society
关键词: MERCURY TELLURIDES;CADMIUM TELLURIDES;CHEMICAL VAPOR DEPOSITION;SURFACE STRUCTURE;THICKNESS;NOZZLES;TERNARY COMPOUNDS;(Hg,Cd)Te
数据来源: AIP
摘要:
Hg1−xCdxTe growth was studied, evaluating the uniformity in terms of the composition, thickness, and surface morphology. Growth was done on a 3 in. GaAs substrate in a vertical reactor using metalorganic chemical vapor deposition featuring a rotating susceptor with multiple nozzles. In a simulation based on the results of our experiment, we found that eight nozzles are needed to grow an epilayer having a compositional variation (Δx) within 0.002. Hg1−xCdxTe was grown using eight nozzles after a CdTe (111)B buffer layer was grown on a 3 in. GaAs (100) wafer. The maximum variation inx(Δx) was 0.010, and the mean value (x̄) was 0.264 over the full surface of the 3 in. diam wafer. The thickness variation (Δd) was 0.7 μm, and the mean value (d̄) 5.7 μm. An evaluation of the surface morphology showed a specular surface with small triangular pits. The etch pit density was 2.6–7.4×106cm−2.
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