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Growth of uniform HgCdTe by metalorganic chemical vapor deposition system

 

作者: S. Murakami,   Y. Sakachi,   H. Nishino,   T. Saito,   K. Shinohara,   H. Takigawa,  

 

期刊: Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena  (AIP Available online 1992)
卷期: Volume 10, issue 4  

页码: 1380-1383

 

ISSN:1071-1023

 

年代: 1992

 

DOI:10.1116/1.585872

 

出版商: American Vacuum Society

 

关键词: MERCURY TELLURIDES;CADMIUM TELLURIDES;CHEMICAL VAPOR DEPOSITION;SURFACE STRUCTURE;THICKNESS;NOZZLES;TERNARY COMPOUNDS;(Hg,Cd)Te

 

数据来源: AIP

 

摘要:

Hg1−xCdxTe growth was studied, evaluating the uniformity in terms of the composition, thickness, and surface morphology. Growth was done on a 3 in. GaAs substrate in a vertical reactor using metalorganic chemical vapor deposition featuring a rotating susceptor with multiple nozzles. In a simulation based on the results of our experiment, we found that eight nozzles are needed to grow an epilayer having a compositional variation (Δx) within 0.002. Hg1−xCdxTe was grown using eight nozzles after a CdTe (111)B buffer layer was grown on a 3 in. GaAs (100) wafer. The maximum variation inx(Δx) was 0.010, and the mean value (x̄) was 0.264 over the full surface of the 3 in. diam wafer. The thickness variation (Δd) was 0.7 μm, and the mean value (d̄) 5.7 μm. An evaluation of the surface morphology showed a specular surface with small triangular pits. The etch pit density was 2.6–7.4×106cm−2.

 

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