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A Synchronizing Valve for Low Frequency (3–15) Hz Injection of Gas into a Vacuum System

 

作者: Charles P. Dolan,  

 

期刊: Review of Scientific Instruments  （AIP Available online 1971）
卷期: Volume 42, issue 8  

页码: 1228-1230

 

ISSN:0034-6748

 

年代: 1971

 

DOI:10.1063/1.1685348

 

出版商: AIP

 

数据来源: AIP

 

摘要:

A pulsed valve is described for regulation of gas flow in vacuum systems using phase sensitive detection techniques. Mechanical and electrical construction detail is given with throughput performance and other characteristics in a given system application.

 

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