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Ultraviolet laser light scattering diagnostics of the plume in pulsed-laser deposition process

 

作者: Tatsuo Okada,   Yoshiki Nakata,   Mitsuo Maeda,   W. K. A. Kumuduni,  

 

期刊: Journal of Applied Physics  (AIP Available online 1997)
卷期: Volume 82, issue 7  

页码: 3543-3547

 

ISSN:0021-8979

 

年代: 1997

 

DOI:10.1063/1.366283

 

出版商: AIP

 

数据来源: AIP

 

摘要:

In order to investigate the gas phase condensation in the pulsed-laser deposition (PLD) process, an ultraviolet (uv) laser light scattering system has been developed and applied for the diagnostics of laser-ablated plumes during the pulsed-laser deposition process of high-Tcthin film fabrications. Time-of-flight measurements were carried out from 1 &mgr;s to 1 s after ablation. Rayleigh-scattered signals from the condensing particles have clearly shown that the condensation occurs in the gas phase under typical PLD conditions. The condensation was noticeable at a large delay time of 10 ms after ablation. At a shorter delay time of less than 500 &mgr;s, laser-induced fluorescence signals from molecules, which were accidentally excited by the uv laser, were also observed. ©1997 American Institute of Physics.

 

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