Ultraviolet laser light scattering diagnostics of the plume in pulsed-laser deposition process
作者:
Tatsuo Okada,
Yoshiki Nakata,
Mitsuo Maeda,
W. K. A. Kumuduni,
期刊:
Journal of Applied Physics
(AIP Available online 1997)
卷期:
Volume 82,
issue 7
页码: 3543-3547
ISSN:0021-8979
年代: 1997
DOI:10.1063/1.366283
出版商: AIP
数据来源: AIP
摘要:
In order to investigate the gas phase condensation in the pulsed-laser deposition (PLD) process, an ultraviolet (uv) laser light scattering system has been developed and applied for the diagnostics of laser-ablated plumes during the pulsed-laser deposition process of high-Tcthin film fabrications. Time-of-flight measurements were carried out from 1 &mgr;s to 1 s after ablation. Rayleigh-scattered signals from the condensing particles have clearly shown that the condensation occurs in the gas phase under typical PLD conditions. The condensation was noticeable at a large delay time of 10 ms after ablation. At a shorter delay time of less than 500 &mgr;s, laser-induced fluorescence signals from molecules, which were accidentally excited by the uv laser, were also observed. ©1997 American Institute of Physics.
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