Improvement in molecular‐beam epitaxy machine reliability using preventive maintenance

 

作者: C. W. Ebert,   L. J. Peticolas,   C. L. Reynolds,   H. H. Vuong,  

 

期刊: Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena  （AIP Available online 1994）
卷期: Volume 12, issue 2  

页码: 616-619

 

ISSN:1071-1023

 

年代: 1994

 

DOI:10.1116/1.587399

 

出版商: American Vacuum Society

 

关键词: MOLECULAR BEAM EPITAXY;PERFORMANCE;MAINTENANCE;WAFERS;FAILURES;REPAIR;MESFET

 

数据来源: AIP

 

 

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