A method of coating thickness determination using cathodic sputtering glow discharge as atomizer with atomic absorption spectrometry (GDAAS) is developed. By the relationship of absorbance A and the specific quantity of sputtering qc, Cu, Ni-P and Zn coating thickness determinations have been tested. Experiments show that if the relationship between A and qc has been established, no properly prepared standards are usually necessary. It is a generally suitable method for conducting samples. Precision > 2.6% and no systematic error has been found.