Gas dynamics of UV‐laser produced vapor plumes
作者:
S. I. Anisimov,
B. S. Luk’yanchuk,
A. Luches,
期刊:
AIP Conference Proceedings
(AIP Available online 1996)
卷期:
Volume 369,
issue 1
页码: 1197-1204
ISSN:0094-243X
年代: 1996
DOI:10.1063/1.50368
出版商: AIP
数据来源: AIP
摘要:
Dynamics of dense laser‐produced vapor plume are studied. The analysis is based on the well‐known special solution of gas dynamics equations that describes the expansion of an ellipsoidal gas cloud into vacuum. This solution is employed to explain the apparent ‘‘rotation’’ of the cloud (so called ‘‘flip‐over effect’’). The flux of atoms to the substrate and the film thickness profiles are calculated using the model. It is shown that the cloud expansion into vacuum and into an ambient gas both are unstable. For short‐wavelength perturbations, estimates of the instability growth rate are presented. ©1996 American Institute of Physics.
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