The scanning tunneling microscope (STM) has been known for its high lateral resolution, but its unreliable vertical accuracy has prevented it from being widely used as a profiler for roughness and step height measurements. An STM equipped with an optical interferometer to calibrate STM tip feedback controlled motion in theZdirection along with interferometers for monitoringXandYraster scanning has been developed. The resolution of the interferometer was 0.12 nm rms. Maximum line scanning distance is 250 &mgr;m and the motion in this direction is secured by a parallel spring mechanism. Step height and pitch measurements on a surface topography standard agree in nanometer scale with the certified value of the standard. The result of high accuracy roughness measurement with the STM supports the common observation that STM measurement gives larger roughness than interferometric measurement. ©1995 American Institute of Physics.