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Effects of boron implantation in films of iron‐nickel

 

作者: J. Ryu,   K. Castell,   W. Nowak,   C. Vittoria,  

 

期刊: Journal of Applied Physics  (AIP Available online 1988)
卷期: Volume 63, issue 8  

页码: 4312-4314

 

ISSN:0021-8979

 

年代: 1988

 

DOI:10.1063/1.340212

 

出版商: AIP

 

数据来源: AIP

 

摘要:

We have implanted boron ions into films of Fe‐Ni alloy composition. A homogeneous distribution of boron was determined from the sputter Auger analysis with a concentration of 18% and 34% for low‐ and high‐dose implantation, respectively. The resistivity of film was increased by a factor of 2 and 4 as a result of low‐ and high‐dose implantation, respectively. The magnetic properties of these films are studied as a function of annealing temperature by using FMR measurements. Both the uniaxial anisotropy field and FMR linewidth are dramatically decreased as a result of annealing at elevated temperatures. The changes of effective magnetization of these films are strongly dependent on implanted boron concentration.

 

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