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Sputtered Layered Synthetic Microstruture (LSM) Dispersion Elements

 

作者: Troy W. Barbee,  

 

期刊: AIP Conference Proceedings  (AIP Available online 1981)
卷期: Volume 75, issue 1  

页码: 131-145

 

ISSN:0094-243X

 

年代: 1981

 

DOI:10.1063/1.33160

 

出版商: AIP

 

数据来源: AIP

 

摘要:

The opportunities offered by engineered synthetic multilayer dispersion elements for x‐rays have been recognized since the earliest days of x‐ray diffraction analysis. In this paper, application of sputter deposition tehnology to the synthesis of Layered Synthetic Microstructure (LSM’s) of sufficient quality or use as x‐ray dispersion elements is discussed. It will be shown that high efficiency, controllble bandwidth dispersion elements, with d spacings varying from 15 A˚ to 180 A˚, may be synthesized onto both mechanically stiff and flexible substrtes. Multilayer component materials include tungten, niobium, molybdenum, titanium, vanadium, and silicon layers separated by carbon layers.Experimental observations of peak reflectivity in first order, integrated reflectivity in first order, and diffraction performance at selected photon energies in the range, 100 to 15000 eV, will be reported and compared to theory. Emphasis is placed on results giving information concerning limiting structural characteristics of these LSM’s. It will be shown that the observed behavior is in accord with theory, both kinematic and dynamic regimes being clearly observed. In addition, the mosaic spread of these LSM’s is not detectable, indicatig that they are perfect structures. A consistent explanation of these experimental results indicates that roughness at the interfaces between constituent layers is the structural characteristic currently limiting diffracting behavior.

 

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