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Investigation of surface roughness and hillock formation on platinized substrates used for Pt/PZT/Pt capacitor fabrication

 

作者: EmilA. Kneer,   DunbarP. Birnie,   R.D. Schrimpf,   J.C. Podlesny,   G. Teowee,  

 

期刊: Integrated Ferroelectrics  （Taylor Available online 1995）
卷期: Volume 7, issue 1-4  

页码: 61-73

 

ISSN:1058-4587

 

年代: 1995

 

DOI:10.1080/10584589508220221

 

出版商: Taylor & Francis Group

 

数据来源: Taylor

 

摘要:

Hillock formation on Pt bottom electrode surfaces has been investigated for ⟨111⟩ Si and sapphire substrates. This paper correlates the electrical performance of Pt/PZT/Pt structured capacitors with the observed surface roughness and/or hillock presence on the Pt bottom electrode.

 

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