Continuum modeling of argon radio frequency glow discharges
作者:
Albert D. Richards,
Brian E. Thompson,
Herbert H. Sawin,
期刊:
Applied Physics Letters
(AIP Available online 1987)
卷期:
Volume 50,
issue 9
页码: 492-494
ISSN:0003-6951
年代: 1987
DOI:10.1063/1.98183
出版商: AIP
数据来源: AIP
摘要:
A continuum model has been developed which successfully describes the concentration, movement, and energetics of charged particles within a rf discharge. This model includes continuity equations for all charged particles, Poisson’s equation to determine the local electric fields, and an electron energy balance to determine the ionization and energy‐loss rates. All input parameters (diffusivity, mobility, ionization, and energy‐loss rate) were defined using reported values determined in dc field experiments.
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