New method of calculating the correction factors for the measurement of sheet resistivity of a square sample with a square four-point probe
作者:
Junsheng Shi,
Yicai Sun,
期刊:
Review of Scientific Instruments
(AIP Available online 1997)
卷期:
Volume 68,
issue 4
页码: 1814-1817
ISSN:0034-6748
年代: 1997
DOI:10.1063/1.1147998
出版商: AIP
数据来源: AIP
摘要:
The finite element method was employed to calculate the correction factors for the measurement of sheet resistivity of a square sample with a square four-point probe. This method is simpler than methods of image and conformal transformation, and can be used for calculating the correction factors for four-point resistivity measurement of an arbitrarily shaped sample with an arbitrary four-probe array. ©1997 American Institute of Physics.
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