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Material effects on the cracking efficiency of molecular beam epitaxy arsenic cracking furnaces

 

作者: Reuy‐Lin Lee,   William J. Schaffer,   Young G. Chai,   David Liu,   James S. Harris,  

 

期刊: Journal of Vacuum Science&Technology B: Microelectronics Processing and Phenomena  （AIP Available online 1986）
卷期: Volume 4, issue 2  

页码: 568-570

 

ISSN:0734-211X

 

年代: 1986

 

DOI:10.1116/1.583375

 

出版商: American Vacuum Society

 

关键词: CRACKING;ARSENIC;ARSENIC COMPOUNDS;VERY HIGH TEMPERATURE;FURNACES;MOLECULAR BEAM EPITAXY;DESIGN;FABRICATION;DECOMPOSITION;As

 

数据来源: AIP

 

摘要:

We have constructed a solid arsenic source cracking furnace and have compared the cracking patterns with four different cracking baffle materials: graphite, tantalum, PBN, and molybdenum. The results show that a definite baffle material effect is observed. For graphite, molybdenum, and PBN, greater decomposition is favored at high temperatures, with the PBN baffles being the least effective. For tantalum baffles, an optimal temperature window is obtained and the dimer content drops at temperatures above 850 °C.

 

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