Molecular beam epitaxy cell optimized for organic compounds and preparation of a Cu phthalocyanine thin film
作者:
S. Hattori,
A. Ishitani,
H. Kuroda,
期刊:
Journal of Vacuum Science&Technology A: Vacuum, Surfaces, and Films
(AIP Available online 1994)
卷期:
Volume 12,
issue 5
页码: 2784-2789
ISSN:0734-2101
年代: 1994
DOI:10.1116/1.578974
出版商: American Vacuum Society
关键词: MOLECULAR BEAM EPITAXY;THIN FILMS;CRYSTAL STRUCTURE;COPPER COMPOUNDS;PHTHALOCYANINES;ULTRAHIGH VACUUM;phthalocyanines
数据来源: AIP
摘要:
We have established a dry process based on molecular beam epitaxy (MBE) of organic molecules under ultrahigh vacuum (UHV) condition on a clean and bare silicon surface. We designed a new MBE system suited to depositing organic materials based on the Monte Carlo simulation of the molecular motion. Cu phthalocyanine thin films were prepared with the system as a test. Films with high flatness and crystallinity without contamination were prepared on the substrates prepared by the UV/HF method developed earlier in our research group. The possibility of controlling the crystal structure of the deposited thin film by the surface crystallinity of the substrate is suggested based on the observation on differently prepared substrate surfaces.
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