Thermal desorption measurement technique
作者:
John F. O’Hanlon,
期刊:
Journal of Vacuum Science&Technology A: Vacuum, Surfaces, and Films
(AIP Available online 1991)
卷期:
Volume 9,
issue 1
页码: 1-4
ISSN:0734-2101
年代: 1991
DOI:10.1116/1.577123
出版商: American Vacuum Society
关键词: THERMAL DESORPTION SPECTROSCOPY;VACUUM SYSTEMS;GAS ANALYSIS;MEASURING METHODS;CALIBRATION;ULTRAHIGH VACUUM;DECOMPOSITION;CARBON OXIDES;BARIUM CARBONATES;ACTIVATION ENERGY
数据来源: AIP
摘要:
Practical thermal desorption measurements require an ultrahigh vacuum (UHV) system with a simple method of calibrating the residual gas analyzer for a number of gases. The calibration system should be easy to move between systems. We describe how the gas injection method of Kendall has been used to calibrate an UHV system and present example measurements of the carbon dioxide and carbon monoxide evolution during the decomposition of a commercial triple carbonate used in cathode ray tube manufacture. The activation energy of the BaCO3component of the triple carbonate was found to be 94.7 kcal/mol.
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