The equipment was built to measure outgassing during mechanical motion of internal components in ultrahigh vacuum (UHV). Mechanical motion is separated into three fundamental modes, namely tension and compression, impact, and sliding. Gases released during the motion in UHV are monitored by a total‐ and a partial‐pressure gauge. Hydrogen is the major component of outgassing from stainless steel and outgassing increases when strain, displacement, and sliding speed increase. Repeated motion produces the surface of a lower outgassing condition, similar to the repeated baking and air exposure. The outgassing is considered as a result of thermal effect.