AlGaAs/GaAs wire and box structures prepared by molecular‐beam epitaxial regrowth oninsitupatterned GaAs substrates
作者:
M. Lo´pez,
N. Tanaka,
I. Matsuyama,
T. Ishikawa,
期刊:
Applied Physics Letters
(AIP Available online 1996)
卷期:
Volume 68,
issue 5
页码: 658-660
ISSN:0003-6951
年代: 1996
DOI:10.1063/1.116500
出版商: AIP
数据来源: AIP
摘要:
We have developed a processing technique which is conducted entirely under an ultrahigh vacuum environment, calledinsituelectron‐beam (EB) lithography, to pattern GaAs substrates on which AlGaAs/GaAs wire and box structures are subsequently regrown. In this technique a thin GaAs oxide layer is selectively formed by EB‐stimulated oxidation under a controlled oxygen atmosphere, and is then used as a mask material to define mesa stripes and mesa squares by Cl2gas etching. Subsequently, the initial mesa size is reduced by the regrowth of a GaAs layer. Finally, AlGaAs/GaAs wire and box structures are fabricated on the top of the mesas by the growth of a quantum well. These structures were characterized by cathodoluminescence measurements at 77 K. ©1996 American Institute of Physics.
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